 |
|
|
|
| HAL: jpa-00225961, version 1 |
| DOI: 10.1051/jphyscol:1986766 |
| Detailed view |  Export this paper |
|
|
| Journal de Physique Colloques 47, C7 (1986) C7-389-C7-397 |
|
|
|
|
| FOCUSED DROPLET BEAM FROM A GOLD LIQUID METAL ION SOURCE |
|
|
| G. BenassayagJ. Orloff |
|
|
| (1986) |
|
|
|
| A gold LMIS has been used in the charged droplet emission mode with a single lens focusing column operating at 20 kV beam voltage to achieve a deposit size at the target of 2.3 to 6.0 depending on the exposure time. The net mass deposit rate maximized at 1.5 µm3/s. From the focusing characteristics an energy spread of 50 V and an energy deficit of 350 to 500 V could be inferred for the charged droplet beam. |
|
|
|
|
| Subject | : | Physics/Physics archives |
|
|
| Attached file list to this document: | |||||
|
|||||
|
|
|
| jpa-00225961, version 1 | |
| http://hal.archives-ouvertes.fr/jpa-00225961 | |
| oai:hal.archives-ouvertes.fr:jpa-00225961 | |
| From: Archives Journal de Physique | |
| Submitted on: Wednesday, 1 January 1986 08:00:00 | |
| Updated on: Wednesday, 1 January 1986 08:00:00 | |
