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| HAL : jpa-00225961, version 1 |
| DOI : 10.1051/jphyscol:1986766 |
| Fiche détaillée |  Récupérer au format |
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| Journal de Physique Colloques 47, C7 (1986) C7-389-C7-397 |
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| FOCUSED DROPLET BEAM FROM A GOLD LIQUID METAL ION SOURCE |
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| G. BenassayagJ. Orloff |
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| (1986) |
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| A gold LMIS has been used in the charged droplet emission mode with a single lens focusing column operating at 20 kV beam voltage to achieve a deposit size at the target of 2.3 to 6.0 depending on the exposure time. The net mass deposit rate maximized at 1.5 µm3/s. From the focusing characteristics an energy spread of 50 V and an energy deficit of 350 to 500 V could be inferred for the charged droplet beam. |
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| Domaine | : | Physique/Articles anciens |
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| jpa-00225961, version 1 | |
| http://hal.archives-ouvertes.fr/jpa-00225961 | |
| oai:hal.archives-ouvertes.fr:jpa-00225961 | |
| Contributeur : Archives Journal de Physique | |
| Soumis le : Mercredi 1 Janvier 1986, 08:00:00 | |
| Dernière modification le : Mercredi 1 Janvier 1986, 08:00:00 | |
