THERMODYNAMIC ASPECTS OF ORGANOMETALLIC VPE

G. Stringfellow

Organometallic vapor phase epitaxy (OMVPE) is a new crystal growth technique which is rapidly gaining popularity due to its simplicity, flexibility and proven ability to grow excellent quality III/V compounds and alloys for device, applications.

Domaines: Articles anciens

G. Stringfellow. THERMODYNAMIC ASPECTS OF ORGANOMETALLIC VPE. Journal de Physique Colloques, 1982, 43 (C5), pp.C5-17-C5-17. ⟨10.1051/jphyscol:1982503⟩. ⟨jpa-00222222⟩