%0 Conference Paper %F Oral %T Growth of Few Graphene Layers on 6H, 4H and 3C-SiC Substrates %+ Centre hospitalier universitaire de Poitiers = Poitiers University Hospital (CHU de Poitiers [La Milétrie]) %+ Laboratoire Charles Coulomb (L2C) %+ Centro Nacional de Microelectronica [Spain] (CNM) %+ Groupe d'étude des semiconducteurs (GES) %+ Instituto de Microelectrònica de Barcelona (IMB-CNM) %+ Institut de Ciència de Materials de Barcelona (ICMAB) %+ National Centre for Microelectronic (CNM) %A Camara, N. %A Huntzinger, J. R. %A Tiberj, Antoine %A Rius, G. %A Jouault, Benoit %A Perez-Murano, F. %A Mestres, N. %A Godignon, P. %A Camassel, J. %Z 7th European Conference on Silicon Carbide and Related Materials, Barcelona, SPAIN, SEP 07-11, 2008 %< avec comité de lecture %B SILICON CARBIDE AND RELATED MATERIALS 2008 %C LAUBLSRUTISTR 24, CH-8717 STAFA-ZURICH, Switzerland %Y PerezTomas %Y A and Godignon %Y P and Vellvehi %Y M and Brosselard %Y P %I TRANS TECH PUBLICATIONS LTD %S Materials Science Forum %V 615-617 %P 203-206 %8 2008 %D 2008 %R 10.4028/www.scientific.net/MSF.615-617.203 %K epitaxial graphene %K 4H-SiC %K 6H-SiC %K 3C-SiC %K AFM %K Raman spectroscopy %Z Physics [physics]/Condensed Matter [cond-mat]Conference papers %X We report a comparative investigation of Few layers graphene grown on 6H, 4H, and 3C-SiC substrates. We show that the size of the graphitic domains depends more on the < 0001 > SiC Surface orientation than the polytypism. %G English %L hal-03037530 %U https://hal.science/hal-03037530 %~ CNRS %~ UNIV-MONTP2 %~ GES %~ L2C %~ MIPS %~ UNIV-MONTPELLIER %~ UM1-UM2 %~ UM-2015-2021