Robust atmospheric pressure plasma source fabricated by microfabrication techniques

Ronan Michaud (1) , Arnaud Stolz (1) , Sylvain Iséni (1) , Olivier Aubry (1) , Philippe Lefaucheux (1) , Remi Dussart (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

Micro hollow cathode discharges (MHCD) operating in DC close to atmospheric pressure in different gases are produced on silicon platforms. Microplasmas were optically and electrically characterized. The micro reactors were also analyzed after operation by SEM observations. Stability enhancement allowed tests of a new geometry that allowed a higher current and power (up to 1 W per microdischarge).

Domaines: Physique des plasmas [physics.plasm-ph]; Plasmas; Milieux fluides et réactifs; Micro et nanotechnologies/Microélectronique; Génie des procédés

Ronan Michaud, Arnaud Stolz, Sylvain Iséni, Olivier Aubry, Philippe Lefaucheux, et al.. Robust atmospheric pressure plasma source fabricated by microfabrication techniques. Journées Nationales sur les Technologies Emergentes (JNTE19), Nov 2019, Grenoble, France. ⟨hal-02291720⟩