%0 Conference Paper
%F Oral 
%T 4H-SIC p-type doping determination from secondary electrons imaging
%+ Institute of Electronic Structure and Laser (FORTH-IESL)
%+ Laboratoire Charles Coulomb (L2C)
%+ Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC )
%A Kayambaki, M
%A Makris, N.
%A Tsagarakis, K.
%A Peyre, Hervé
%A Stavrinidis, A
%A Zekentes, K.
%Z session poster: MO.P.FP14
%< avec comité de lecture
%Z CMNE
%B 12th European Conference on Silicon Carbide and Related Materials (ECSCRM)
%C Birmingham, United Kingdom
%8 2018-09-02
%D 2018
%Z Engineering Sciences [physics]/Materials
%Z Chemical Sciences/Material chemistry
%Z Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
%Z Physics [physics]/Physics [physics]/Chemical Physics [physics.chem-ph]Conference papers
%G English
%L hal-02066375
%U https://hal.science/hal-02066375
%~ UNIV-SAVOIE
%~ UGA
%~ CNRS
%~ INPG
%~ L2C
%~ IMEP-LAHC
%~ MIPS
%~ UNIV-MONTPELLIER
%~ UGA-COMUE
%~ USMB-COMUE
%~ UM-2015-2021
%~ CROMA