%0 Conference Paper
%F Oral 
%T Influence of Site Competition Effects on Dopant Incorporation during Chemical Vapor Deposition of 4H-SiC Epitaxial Layers
%+ Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA)
%+ NOVASiC
%+ Savoie Technolac (Technolac)
%+ Laboratoire de photonique et de nanostructures (LPN)
%+ Laboratoire Charles Coulomb (L2C)
%A Arvinte, Roxana
%A Zielinski, Marcin
%A Chassagne, Thierry
%A Portail, Marc
%A Michon, Adrien
%A Kwasnicki, Pawel
%A Juillaguet, Sandrine
%A Peyre, Hervé
%< avec comité de lecture
%B 10th European Conference on Silicon Carbide and Related Materials
%C Grenoble, France
%V 821-823
%P 149-152
%8 2014-09
%D 2014
%Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]Conference papers
%G English
%L hal-02025329
%U https://hal.science/hal-02025329
%~ UNICE
%~ CNRS
%~ L2C
%~ MIPS
%~ UNIV-MONTPELLIER
%~ UNIV-COTEDAZUR
%~ CRHEA
%~ UM-2015-2021