%0 Conference Proceedings
%T Raman Investigation of Heavily Al Doped 4H-SiC Layers Grown by CVD
%+ Laboratoire Charles Coulomb (L2C)
%+ Semi-conducteurs: Graphène, Grand gap & Photovoltaïque (SMC)
%+ Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA)
%+ NOVASiC
%A Kwasnicki, Pawel
%A Arvinte, Roxana
%A Peyre, Herve
%A Zielinski, Marcin
%A Konczewicz, Leszek
%A Contreras, Sylvie
%A Camassel, Jean
%A Juillaguet, Sandrine
%< avec comité de lecture
%Z L2C:14-390
%( Material Sciences Forum
%B HETEROSIC 2013
%C nice, France
%V 806
%P 51 - 55
%8 2013-06
%D 2013
%R 10.4028/www.scientific.net/MSF.806.51
%Z Physics [physics]/Condensed Matter [cond-mat]Conference papers
%X Raman Investigation of Heavily Al Doped 4H-SiC Layers Grown by CVD
%G English
%L hal-01936666
%U https://hal.science/hal-01936666
%~ UNICE
%~ CNRS
%~ L2C
%~ MIPS
%~ UNIV-MONTPELLIER
%~ UNIV-COTEDAZUR
%~ CRHEA
%~ UM-2015-2021