%0 Conference Paper
%F Oral 
%T Investigation of Aluminum Incorporation in 4H-SiC Epitaxial Layers
%+ Savoie Technolac (Technolac)
%+ NOVASiC
%+ Centre de recherche sur l'hétéroepitaxie et ses applications (CRHEA)
%+ Laboratoire Charles Coulomb (L2C)
%+ Semi-conducteurs: Graphène, Grand gap & Photovoltaïque (SMC)
%A Arvinte, Roxana
%A Zielinski, Marc
%A Chassagne, Thierry
%A Portail, Marc
%A Michon, Adrien
%A Kwasnicki, Pawel
%A Juillaguet, Sandrine
%A Peyre, Herve
%< avec comité de lecture
%Z L2C:14-389
%3 Materials Sciences Forum
%B HETEROSIC 2013
%C Nice, France
%V 806
%P 45 - 50
%8 2013-06-13
%D 2013
%R 10.4028/www.scientific.net/MSF.806.45
%Z Physics [physics]/Condensed Matter [cond-mat]Conference papers
%X Investigation of Aluminum Incorporation in 4H-SiC Epitaxial Layers
%G English
%L hal-01936612
%U https://hal.science/hal-01936612
%~ UNICE
%~ CNRS
%~ L2C
%~ MIPS
%~ UNIV-MONTPELLIER
%~ UNIV-COTEDAZUR
%~ CRHEA
%~ UM-2015-2021
%~ TEST3-HALCNRS