%0 Journal Article
%T Study and optimization of Al-doped ZnO thin films deposited on PEN substrates by RF-magnetron sputtering from nanopowders targets
%+ Procédés, Matériaux et Energie Solaire (PROMES)
%+ Laboratoire Charles Coulomb (L2C)
%A Hamrit, S.
%A Djessas, K.
%A Brihi, N.
%A Briot, Olivier
%A Moret, Matthieu
%A Ben Ayadi, Z.
%< avec comité de lecture
%Z L2C:15-256
%@ 0957-4522
%J Journal of Materials Science: Materials in Electronics
%I Springer Verlag
%V 27
%N 2
%P 1730-1737
%8 2016-02
%D 2016
%R 10.1007/s10854-015-3947-6
%Z Engineering Sciences [physics]/MaterialsJournal articles
%X In this study, we have used RF-magnetron sputtering to deposit Al-doped ZnO (AZO) nanostructures thin films on poly-ethylene naphthalate (PEN) substrates. The compacted AZO nanopowders with different Al concentrations (0, 1, 2, 3 and 4 at.%), which were synthesized by sol–gel method combined with a supercritical drying process, have been used as targets. Structural, optical and electrical properties of deposited thin films with different Al concentrations have been investigated. X-ray diffraction results indicated that all the deposited thin films have hexagonal wurzite structure with c-axis orientation without any secondary phases. The SEM cross section image of the films revealed very dense columnar nanostructure. The best electrical properties (ρ = 4 × 10−4 Ω cm, µ = 22 cm2 V−1 s−1, and ne = 8 × 1E20 cm−3) were obtained for the AZO samples containing 2 at.% of Al. The thin films show an average transmittance of 80 % with the PEN substrate in the visible region.
%G English
%L hal-01280701
%U https://hal.science/hal-01280701
%~ CNRS
%~ UNIV-PERP
%~ L2C
%~ PROMES
%~ MIPS
%~ UNIV-MONTPELLIER
%~ UM-2015-2021