Improvement of signal to noise ratio in electro optical probing technique by wavelets filtering

Anthony Boscaro (1, 2) , S Jacquir (1) , K Sanchez (2) , P Perdu (2) , Stéphane Binczak (1)

1 Le2i - Laboratoire Electronique, Informatique et Image [UMR6306]
2 CNES - Centre National d’Études Spatiales [Paris]

Electro Optical Probing (EOP) technique is an efficient backside contacless technique to measure waveforms in modern VLSI circuits. The signal related intensity variation of the reflected beam is very weak therefore, to acquire a signal with enough Signal to Noise Ratio, averaging techniques are usually performed. Resulting acquisition time for one waveform are too long to implement point to point probing to image mode. To overcome this limitation, we have developped a new filtering by wavelets approach to keep a good SNR while significantly reducing this acquisition time. It opens the doors to new multipoint probing applications. In this paper, we describe the technique, its efficiency in terms of SNR, execution time and limits.

Mots clés: Failure analysis, Electro optical probing, Filtering, Wavelets, Signal to noise ratio improvement

Domaines: Traitement du signal et de l'image [eess.SP]; Electronique

Anthony Boscaro, S Jacquir, K Sanchez, P Perdu, Stéphane Binczak. Improvement of signal to noise ratio in electro optical probing technique by wavelets filtering. Microelectronics Reliability, 2015, Proceedings of the 26th European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, 55 (9-10), pp.1585-1591. ⟨10.1016/j.microrel.2015.06.100⟩. ⟨hal-01465725⟩