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Communication Dans Un Congrès Année : 2014

Spatial correction in dynamic photon emission by affine transformation matrix estimation

Résumé

Photon emission microscopy and Time Resolved Imaging have proved their efficiency for defect localization on VLSI. A common process to find defect candidate locations is to draw a comparison between acquisitions on a normally working device and a faulty one. In order to be accurate and meaningful, this method requires that the acquisition scene remains the same between the two parts. In practice, it can be difficult to set. In this paper, a method to correct position by affine matrix transformation is suggested. It is based on image features detection, description and matching and affine transformation estimation.
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Dates et versions

hal-01073233 , version 1 (09-10-2014)

Identifiants

  • HAL Id : hal-01073233 , version 1

Citer

Samuel Chef, Sabir Jacquir, Philippe Perdu, Kevin Sanchez, Stéphane Binczak. Spatial correction in dynamic photon emission by affine transformation matrix estimation. IEEE 21st Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA), Jun 2014, Singapore. pp.118-122. ⟨hal-01073233⟩
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