Magnetostrictive stress reconfigurable thin film resonators for near direct current magnetoelectric sensors

Jillian Kiser (1) , Ron Lacomb (1) , Konrad Bussmann (2) , Christopher J. Hawley (3) , Jonathan E. Spanier (3) , Xin Zhuang (4) , Christophe Dolabdjian (4) , Sam Lofland (5) , Peter Finkel (1, 2)

1 Naval Undersea Warfare Center
2 NRL - Naval Research Laboratory
3 Department of Materials Science and Engineering and A. J. Drexel Nanotechnology Institute ( Philadelfia, USA)
4 Equipe Electronique - Laboratoire GREYC - UMR6072
5 Department of Physics, Rowan University, Glassboro

The magnetic response of microdevices is significantly enhanced at structural resonance allowing for improved sensitivity and signal-to-noise ratio. Here, free-standing thin film CoFe bridge resonators have been fabricated and investigated. It is shown that the strong magnetic field dependence of the fundamental resonance frequency is a function of magnetic field orientation due to stress-induced anisotropy. These devices may offer a new approach for developing fully integrated resonant magnetic field sensing technology

Domaines: Sciences de l'ingénieur [physics]; Electromagnétisme

Jillian Kiser, Ron Lacomb, Konrad Bussmann, Christopher J. Hawley, Jonathan E. Spanier, et al.. Magnetostrictive stress reconfigurable thin film resonators for near direct current magnetoelectric sensors. Applied Physics Letters, 2014, pp.P072408. ⟨hal-00995298⟩