Length-extension LGS microresonators for FM-AFM: microfabrication and shear effects sensitivity

Thérèse Leblois (1) , Fabien Henrot (1) , Etienne Herth (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Length extension LGS resonators have already been studied in order to make probes for frequency-modulation atomic force microscopy. Theoretical investigations are conducted on the design of the probes to improve the resolution of the microscope. Comparison of quartz and LGS crystal performances can be made using these theoretical results. The microfabrication of LGS resonators by chemical etching is proved. A monolithic length extension resonator with a tip at its end is obtained which constitutes a real advantage in regard to the existing piezoelectric probes.

Domaines: Micro et nanotechnologies/Microélectronique

Thérèse Leblois, Fabien Henrot, Etienne Herth. Length-extension LGS microresonators for FM-AFM: microfabrication and shear effects sensitivity. 2014. ⟨hal-00974933⟩