Positioning accuracy characterization of assembled microscale components for micro-optical benches

Cédric Clévy (1) , Ion Lungu (1) , Kanty Rabenorosoa (1) , Philippe Lutz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This paper deals with the measurement of microscale components' positioning accuracies used in the assembly of Micro-Optical Benches (MOB). The concept of MOB is presented to explain how to build optical MEMS based on out-of-plane micro-assembly of microcomponents. The micro-assembly platform is then presented and used to successfully assemble MOB. This micro-assembly platform includes a laser sensor that enables the measure of the microcomponent's position after its assembly. The measurement set-up and procedure is displayed and applied on several micro-assembly sets. The measurement system provides results with a maximum deviation less than +/- 0.005°. Based on this measurement system and micro-assembly procedure, the article shows that it is possible to obtain a positioning errors down to 0.009°. These results clearly state that micro-assembly is a possible way to manufacture complex, heterogeneous and 3D optical MEMS with very good optical performances.

Domaines: Micro et nanotechnologies/Microélectronique

Cédric Clévy, Ion Lungu, Kanty Rabenorosoa, Philippe Lutz. Positioning accuracy characterization of assembled microscale components for micro-optical benches. Assembly Automation, 2014, 34, pp.69-77. ⟨hal-00972276⟩