CALIBRATION OF CAPACITIVE SENSORS AND ELECTRONIC LEVELS FOR THE STRAIGHTNESS MEASUREMENTS USING MULTIPROBE METHOD

Siriwan Boripatkosol (1) , Stéphane Leleu (2) , Thierry Coorevits (3) , Olivier Gibaru (2)

1 College of Industrial Technology
2 L2MA - Laboratoire de Métrologie et de Mathématiques Appliquées
3 LML - Laboratoire de Mécanique de Lille - FRE 3723

In this work, the straightness length 300 mm measurement under nanometer uncertainty. The proposed methodology represents a process known as propagation using the assumption of small displacement which leads to solving an overdetermined linear system. The experimental studies were carried out on the capacitive sensors and electronic levels. The least squares mathematic method is apply to calculate the optimal solution. This method requires taking into account the uncertainties of the two different types of sensors leads to method of weighted least squares. The first step is to calibrate the sensors and to estimate the effect on the calculated straightness.

Mots clés: Nanometrology; straightness; propagation

Domaines: Génie mécanique [physics.class-ph]; Génie mécanique [physics.class-ph]

Siriwan Boripatkosol, Stéphane Leleu, Thierry Coorevits, Olivier Gibaru. CALIBRATION OF CAPACITIVE SENSORS AND ELECTRONIC LEVELS FOR THE STRAIGHTNESS MEASUREMENTS USING MULTIPROBE METHOD. Congrès International de Métrologie, Feb 2014, France. ⟨hal-00941724⟩