Active Control of Silicon Nanotweezers Detects Enzymatic Reaction at the Molecular Level

Nicolas Lafitte (1) , Yassine Haddab (2) , Yann Le Gorrec (2) , Hervé Guillou (1) , Laurent Jalabert (1) , Dominique Collard (1) , Hiroyuki Fujita (1)

1 LIMMS - Laboratory for Integrated Micro Mechatronics Systems
2 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This work achieved the control of micromachined tweezers for the enhancement of the sensing of DNA molecules and related enzymatic reactions. The mechanical stiffness of the silicon nanotweezers is decreased by feedback design and the sensitivity of the system is drastically improved.

Domaines: Micro et nanotechnologies/Microélectronique

Nicolas Lafitte, Yassine Haddab, Yann Le Gorrec, Hervé Guillou, Laurent Jalabert, et al.. Active Control of Silicon Nanotweezers Detects Enzymatic Reaction at the Molecular Level. 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS'13 & EUROSENSORS XXVII, Jan 2013, Barcelona, Spain. pp.1077-1078. ⟨hal-00912510⟩