Touching nanospace : Atomic Force Microscope coupling with a force feedback manipulation system

Sylvain Marlière (1) , Florence Marchi (2) , Frédéric Gay (3) , Joël Chevrier (2) , Daniela Urma (1) , Jean-Loup Florens (1) , Claude Cadoz (1) , Annie Luciani (1)

1 ACROE - ACROE
2 CP
3 LEPES - Laboratoire d'Etudes des Propriétés Electroniques des Solides

Today, Scanning Probe Microscopies (SPM) are widely used in physics, chemistry and biology in order to image surfaces with a great resolution but also more and more as tool to manipulate nano-objects or to modify surfaces at nanometer scale. At the present time, using SPM to manipulate nano-objects is not user friendly and is time consuming. These two weak points are due to the absence of feedback control in real time of the tip movements and of tip-surface or tip/nano-objects interactions. The aim of our research work is to realise an active feedback control interface which will allow to feel in real time but also to simulate the tip movement and/or tip-surface/nano-objects interactions.

Domaines: Synthèse d'image et réalité virtuelle [cs.GR]; Micro et nanotechnologies/Microélectronique

Sylvain Marlière, Florence Marchi, Frédéric Gay, Joël Chevrier, Daniela Urma, et al.. Touching nanospace : Atomic Force Microscope coupling with a force feedback manipulation system. 12th international conference on Scanning, Tunneling, Microscopy/Spectroscopy and related techniques, 2003, Eindhoven, Netherlands. pp.2. ⟨hal-00910599⟩