Duo-bimorph actuator made of PMN-PT [011] : 3D modeling, development and characterization.

Ioan Alexandru Ivan (1) , Adrian Ciubotariu (1) , Cédric Clévy (1) , Philippe Lutz (1) , Nicolas Chaillet (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This paper reports the development of a duo-bimorph cantilevered actuator made of PMN-PT material and intended for large-stroke micro-scale manipulation. The principle of operation is piezoelectric, but with a series of material-induced particularities: PMN-PT is reputed for its very high piezoelectric and electromechanical coupling characteristics, but exhibits a lower coercive field which prevents driving in a fully bipolar manner. Instead of the uniaxial [001] plate, by using the anisotropic [011] cut, a positive transverse d31 piezoelectric coefficient may be exploited. This allows the extension of the structure with the applied voltage, which is particularly beneficial for micro-gripping. After an introductory part in piezo-materials and duo-bimorph structures, a comprehensive static three-dimensional displacement modeling is provided by means of constitutive matrix equations. The actuator micro-manufacturing is presented, followed by the experimental characterization. Compared to the classical PZT structures, the actuation is increased by a factor of two, up to 600 μm in the transversal plane and up to 20 μm longitudinally. Some perspectives related to 3 DoF (Degrees of Freedom) micro-manipulation tasks are finally approached.

Domaines: Micro et nanotechnologies/Microélectronique

Ioan Alexandru Ivan, Adrian Ciubotariu, Cédric Clévy, Philippe Lutz, Nicolas Chaillet. Duo-bimorph actuator made of PMN-PT [011] : 3D modeling, development and characterization.. IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM'13., Jan 2013, Australia. pp.140-145. ⟨hal-00876288⟩