Calibration of Single-axis Nanopositioning cell subjected to thermal disturbance.

Ning Tan (1) , Cédric Clévy (1) , Nicolas Chaillet (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

In micromanipulation, especially microassembly, accuracy is a criterion useful for characterizing the performance of microrobots. The increase of positioning accuracy is a very important issue before making automatic assembly or other micro-tasks such as characterization. Thermal drift is one of the major sources of inaccuracy for automatic micromanipulation in ambient conditions and even in clean room. This paper addresses the calibration of a 1-DOF (Degree Of Freedom) nanopositioning cell including thermal drift compensation. The nanopositioning cell consists of a single-axis PZT stage and a XYZ manual stage which is usually used for fine positioning in microassembly platform. Subsequently, validations are implemented to test the performance by integrating the calibrated model. The experimental results show an effective improvement of the accuracy by a factor of 7 when temperature changes in the range of temperature for training, and 2.4 times improvement is achieved when temperature goes out of the training range.

Domaines: Micro et nanotechnologies/Microélectronique

Ning Tan, Cédric Clévy, Nicolas Chaillet. Calibration of Single-axis Nanopositioning cell subjected to thermal disturbance.. IEEE International Conference on Robotics and Automation, ICRA'13., Jan 2013, Germany. pp.3660-3665. ⟨hal-00876266⟩