Visual Servoing-Based approach for efficient autofocusing in Scanning Electron Microscope.

Naresh Marturi (1) , Brahim Tamadazte (1) , Sounkalo Dembélé (1) , Nadine Piat (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Fast and reliable autofocusing methods are essential for performing automatic nano-objects positioning tasks using a scanning electron microscope (SEM). So far in the literature, various autofocusing algorithms have been proposed utilizing a sharpness measure to compute the best focus. Most of them are based on iterative search approaches; applying the sharpness function over the total range of focus to find an image in-focus. In this paper, a new, fast and direct method of autofocusing has been presented based on the idea of traditional visual servoing to control the focus step using an adaptive gain. The visual control law is validated using a normalized variance sharpness function. The obtained experimental results demonstrate the performance of the proposed autofocusing method in terms of accuracy, speed and robustness.

Domaines: Micro et nanotechnologies/Microélectronique

Naresh Marturi, Brahim Tamadazte, Sounkalo Dembélé, Nadine Piat. Visual Servoing-Based approach for efficient autofocusing in Scanning Electron Microscope.. IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS'13., Nov 2013, Tokyo, Japan. pp.2677-2682. ⟨hal-00876197⟩