A Microfabricated Planar Digital Microrobot for Precise Positioning Based on Bistable Modules

Vincent Chalvet (1) , Yassine Haddab (1) , Philippe Lutz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Size reduction is a constant objective in new technologies, for which very accurate devices are needed when manipulating sub-millimetric objects. A new kind of microfabricated microrobot based on the use of bistable modules is designed to perform open-loop controlled micropositioning tasks. The DiMiBot (Digital MicroroBot) opens a new paradigm in the design of microrobots by using mechanical stability instead of complex control strategies. We propose a new architecture of digital microrobot for which forward and inverse kinematics models are easy to use. These kinematic models are validated with FEA simulations before the fabrication of a real DiMiBot prototype. Tests and characterization of the prototype are made and compared to the desired behavior. Thanks to its submicrometric resolution and to its small dimensions ( 400 μm thickness), it is able to manipulate micro-objects in confined environments, where no other robot can be used.

Domaines: Micro et nanotechnologies/Microélectronique

Vincent Chalvet, Yassine Haddab, Philippe Lutz. A Microfabricated Planar Digital Microrobot for Precise Positioning Based on Bistable Modules. IEEE Transactions on Robotics, 2013, 3, pp.641-649. ⟨hal-00840149⟩