Fiber optics sensor for sub-nanometric displacement and wide bandwidth systems

Luc Perret (1) , Luc Chassagne (1) , Suat Topsu (1) , Pascal Ruaux (1) , Barthélemy Cagneau (1) , Yasser Alayli (1)

1 LISV - Laboratoire d'Ingénierie des Systèmes de Versailles

In this paper, we report fiber optics sensor with sub-nanometric resolution and wide bandwidth. It relies on an increase of the reception fibers number and on low-noise electronics. Moreover, a reference channel has been implemented using a semi-reflective plate to eliminate the source fluctuations and the fiber sensor was isolated to limit external influence of temperature and pressure. Thus we achieve both a sub-nanometric resolution on a 400 ms integration time and a long-term drift as low as 40 nm.h-1. The setup has been also adapted to high speed applications by increasing the bandwidth up to 38 kHz. It can display a 28 nm peak-to-peak limit of resolution on an aluminized piezoactuator. It has been successfully used to test the resonance frequency of a vibrating plate actuated by two high-frequency prototypes of piezoactuators. These improvements lead to low cost fibers optic sensors interesting for non-contact displacement measurements with high sensitivity.

Mots clés: Fiber optics; High resolution sensor; Distance measurement; Vibration measurement; High bandwidth sensor; Low-noise electronics

Domaines: Optique [physics.optics]; Micro et nanotechnologies/Microélectronique

Luc Perret, Luc Chassagne, Suat Topsu, Pascal Ruaux, Barthélemy Cagneau, et al.. Fiber optics sensor for sub-nanometric displacement and wide bandwidth systems. Sensors and Actuators A: Physical , 2010, 165, pp.189-193. ⟨10.1016/j.sna.2010.10.010⟩. ⟨hal-00834553⟩