Enlarged atomic force microscopy scanning scope: Novel sample-holder device with millimeter range

Ahmad Sinno (1) , Pascal Ruaux (1) , Luc Chassagne (1) , Suat Topsu (1) , Yasser Alayli (1) , Gilles Lerondel (2) , Sylvain Blaize (2) , Aurélien Bruyant (2) , Pascal Royer (2)

1 LISV - Laboratoire d'Ingénierie des Systèmes de Versailles
2 LNIO - Laboratoire de Nanotechnologie et d'Instrumentation Optique

We propose a homemade sample-holder unit used for nanopositionning in two dimensions with a millimeter traveling range. For each displacement axis, the system includes a long range traveling stage and a piezoelectric actuator for accurate positioning. Specific electronics is integrated according to metrological considerations, enhancing the repeatability performances. The aim of this work is to demonstrate that near-field microscopy at the scale of a chip is possible. For this we chose to characterize highly integrated optical structures. For this purpose, the sample holder was integrated into an atomic force microscope. A millimeter scale topographical image demonstrates the overall performances of the combined system.

Mots clés: Instrumentation; atomic force microscopy

Domaines: Micro et nanotechnologies/Microélectronique; Instrumentations et Détecteurs [physics.ins-det]

Ahmad Sinno, Pascal Ruaux, Luc Chassagne, Suat Topsu, Yasser Alayli, et al.. Enlarged atomic force microscopy scanning scope: Novel sample-holder device with millimeter range. Review of Scientific Instruments, 2007, 78, pp.095107. ⟨10.1063/1.2773623⟩. ⟨hal-00830874⟩