%0 Conference Proceedings %T (112) and (220)/(204)-oriented CuInSe2 thin films grown by co-evaporation under vacuum %+ Laboratoire Charles Coulomb (L2C) %A Ruffenach, Sandra %A Robin, Yoann %A Moret, Matthieu %A Aulombard, Roger %A Briot, Olivier %< avec comité de lecture %Z L2C:13-065 %( Thin Solid Films %B E-MRS Spring Meeting %C Strasbourg, France %V 535 %P 143 %8 2012-05-14 %D 2012 %Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]Conference papers %X CuInSe2 (CIS) layers were grown by co-evaporation in a molecular beam epitaxy system onto soda lime glass substrates by using both two-step and three step processes. The physical properties of the layers were investigated using X-ray diffraction (XRD) and optical spectroscopy. The sample atomic composition was assessed by energy dispersive analysis of X-rays. Cu-rich or In-rich CIS thin films were obtained exhibiting strong preferential (112) and (220)/(204) orientations in both cases. We performed thermal annealing at 450 °C under nitrogen, keeping Se overpressure to avoid Se desorption from the layer. The annealed layers all exhibit improved crystalline quality, with reduced stoichiometric discrepancy. The secondary phases like CuxSe1 − x or InxSe1 − x are no more observable by XRD measurements. Regarding the preferential orientation, thermal annealing of Cu-rich CIS layers favours the (112) orientation leading to a more (112) textured layer after annealing, whatever the initial preferential growth orientation was. In opposite, thermal annealing of In-rich samples increases the (220)/(204) texture of the sample. %G English %L hal-00820323 %U https://hal.science/hal-00820323 %~ CNRS %~ L2C %~ MIPS %~ UNIV-MONTPELLIER %~ UM-2015-2021