Design and fabrication of an acoustic bragg mirror for miniaturized quartz resonators

Eric Lebrasseur , Thomas Baron , Sébastien Alzuaga (1) , Jean-Jacques Boy , Laurent Couteleau , Sylvain Ballandras

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

The use of a Bragg mirror for the confinement of the energy in the resonator appears nowadays as a promising way to achieve monolithic resonators, with simplified packaging, free of the constraint effects induced by the traditional quartz cases and free of low resonant frequencies disturbances. Moreover, this approach offers the possibility of batch processing on four inches wafers. The expected benefits are a diminution of the quartz layer thickness, a rigid holding from the backside of the device, and the transfer of the electrical connections to the topside only. The packaging is further simplified by the fact that only the topside needs to be encapsulated, for instance by quartz bonding technology. In this work we present the design and fabrication of an acoustic Bragg mirror used to enhance the performances of traditional quartz resonators. The best materials configurations are determined by simulations and the mirror is fabricated by wafer bonding technology based on metallic compression.

Mots clés: Bragg Mirror; Resonator; Quartz

Domaines: Acoustique [physics.class-ph]

Eric Lebrasseur, Thomas Baron, Sébastien Alzuaga, Jean-Jacques Boy, Laurent Couteleau, et al.. Design and fabrication of an acoustic bragg mirror for miniaturized quartz resonators. Acoustics 2012, Apr 2012, Nantes, France. ⟨hal-00811237⟩