Acoustic wave filter based on periodically poled lithium niobate

E. Courjon (1) , F. Bassignot (1) , G. Ulliac (1) , S. Benchabane (1) , S. Ballandras (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Solutions for the development of compact RF passive transducers as an alternative to standard surface or bulk acoustic wave devices are receiving increasing interest. This article presents results on the development of an acoustic band-pass filter based on periodically poled ferroelectric domains in lithium niobate. The fabrication of periodically poled transducers (PPTs) operating in the range of 20 to 650 MHz has been achieved on 3-in (76.2-mm) 500-μm-thick wafers. This kind of transducer is able to excite elliptical as well as longitudinal modes, yielding phase velocities of about 3800 and 6500 ms(-1), respectively. A new type of acoustic band-pass filter is proposed, based on the use of PPTs instead of the SAWs excited by classical interdigital transducers. The design and the fabrication of such a filter are presented, as well as experimental measurements of its electrical response and transfer function. The feasibility of such a PPT-based filter is thereby demonstrated and the limitations of this method are discussed.

Domaines: Electronique; Acoustique [physics.class-ph]

E. Courjon, F. Bassignot, G. Ulliac, S. Benchabane, S. Ballandras. Acoustic wave filter based on periodically poled lithium niobate. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 2012, 59 (9), pp.1942-1949. ⟨10.1109/TUFFC.2012.2411⟩. ⟨hal-00776521⟩