Four dof Piezoelectric Microgripper Equipped with a Smart CMOS Camera.

Brahim Tamadazte (1) , Michel Paindavoine (2) , Joël Agnus (1) , Valérie Pétrini (1) , Nadine Le Fort-Piat (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 LEAD - Laboratoire d'Etude de l'Apprentissage et du Développement [Dijon]

This paper deals with the design of a micro-eyein- hand architecture. It consists of a smart camera embedded on a gripper. The camera is a high speed (10 000 fps) CMOS sensor of 64 64 pixels. Each pixel measures 35 m 35 m and includes a photodiode, an amplifier, two storage capacitors, and an analog arithmetic unit. The gripper consists of a 4 dof (degrees-of-freedom) (y+, y-, z+, z-) microprehensile based on piezoelectric actuators.

Mots clés: Microrobotics; CMOS Sensor; Microgripper; Eye-in-Hand System; Micromanipulation; Microrobotics.

Domaines: Micro et nanotechnologies/Microélectronique

Brahim Tamadazte, Michel Paindavoine, Joël Agnus, Valérie Pétrini, Nadine Le Fort-Piat. Four dof Piezoelectric Microgripper Equipped with a Smart CMOS Camera.. Journal of Microelectromechanical Systems, 2012, 21 (2), pp.256-258. ⟨10.1109/JMEMS.2011.2180363⟩. ⟨hal-00768463⟩