A tunable hybrid electro-magnetomotive NEMS device for low temperature physics
Résumé
Microfabrication techniques have made possible the realization of mechanical devices with dimensions in the micro- and nano-scale domain. At low temperatures, one can operate and study these devices in well-controlled conditions, namely low electrical noise and cryogenic vacuum, with the ability to use high magnetic fields and superconducting coating metals 1. Moreover, the temperature turns out to be a control parameter in the experimental study of mechanical dissipation processes, with the cryogenic environment ensuring that only low energy states are thermally populated. Immersed in a quantum fluid, these MEMS and NEMS devices (micro and nano electro-mechanical systems) can probe the excitations of the liquid at a smaller scale, with higher frequencies and better resolution than "classical" techniques 2. We present experimental results obtained in vacuum on cantilever NEMS structures which can be both magnetomotive and electrostatically driven. The device is extremely sensitive with resolved displacements down to 1 °A using conventional room-temperature electronics. It is calibrated in-situ, and frequency/non-linearity can be tuned electrostatically. The design should allow parametric amplification to be used
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