2-DOF Contactless Distributed Manipulation Using Superposition of Induced Air Flows.

Anne Delettre (1) , Guillaume J. Laurent (1) , Nadine Le Fort-Piat (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Many industries require contactless transport and positioning of delicate or clean objects such as silicon wafers, glass sheets, solar cell or flat foodstuffs. The authors have presented a new form of contactless distributed manipulation using induced air flow. Previous works concerned the evaluation of the maximal velocity of transported objects and one degreeof- freedom position control of objects. This paper introduces an analytic model of the velocity field of the induced air flow according to the spatial configuration of vertical air jets. Then two degrees-of-freedom position control is investigated by exploiting the linearity property of the model. Finally the model is validated under closed-loop control and the performances of the position control are evaluated.

Domaines: Micro et nanotechnologies/Microélectronique

Anne Delettre, Guillaume J. Laurent, Nadine Le Fort-Piat. 2-DOF Contactless Distributed Manipulation Using Superposition of Induced Air Flows.. IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS'11., Sep 2011, San Francisco, CA., United States. pp.5121-5126. ⟨hal-00720667⟩