Structural and gas-sensing properties of CuO-CuxFe3−xO4 nanostructured thin films

Audrey Chapelle (1) , Mohd H. Yaacob (2, 3) , Isabelle Pasquet (1) , Lionel Presmanes (1) , Antoine Barnabé (1) , Philippe Tailhades (1) , Johan Du Plessis (4) , Kourosh Kalantar-Zadeh (2)

1 CIRIMAT - Centre interuniversitaire de recherche et d'ingenierie des matériaux
2 School of Electrical and Computer Engineering
3 Faculty of Engineering, Universiti Putra Malaysia, Serdang, Selangor
4 Applied Physics, School of Applied Sciences

Nanocrystalline CuO-CuxFe3−xO4 thin films were developed using a radio-frequency sputtering method followed by a thermal oxidation process. Thin films were deposited applying two very different conditions by varying the argon pressure and the target-to-substrate distance. Structural, microstructural and gas-sensing characteristics were performed using grazing incidence X-ray diffraction (GXRD), Raman spectroscopy, atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM), scanning electron microscopy (SEM), and electrical measurements. Their sensing properties were examined using hydrogen gas in dry synthetic air. The shortest response and recovery times were observed between 280 and 300 °C independently of the deposition conditions.

Mots clés: Copper oxide; Nanocomposite; Spinel ferrite; RF-sputtering; Gas sensor

Domaines: Matériaux

Audrey Chapelle, Mohd H. Yaacob, Isabelle Pasquet, Lionel Presmanes, Antoine Barnabé, et al.. Structural and gas-sensing properties of CuO-CuxFe3−xO4 nanostructured thin films. Sensors and Actuators B: Chemical, 2010, vol. 153, pp. 117-124. ⟨hal-00717490⟩