Particle Collecting in a 13.56 MHz Radiofrequency Methane Discharge

Véronique Massereau-Guilbaud (1) , Isabelle Géraud-Grenier (1) , André Plain (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés

Radiofrequency methane plasmas are widely used for deposition of amorphous hydrogenated coatings a-C:H in PECVD reactors. According to our experimental conditions, particles are also generated in the plasma. The study of the chemical nature of these particles requires a sufficient quantity to be collected at the end of the experiment. We show that a modification of the electrical field lines above the grounded electrode improves particle collecting.

Mots clés: Dusty plasma

Domaines: Physique des plasmas [physics.plasm-ph]

Véronique Massereau-Guilbaud, Isabelle Géraud-Grenier, André Plain. Particle Collecting in a 13.56 MHz Radiofrequency Methane Discharge. IEEE Transactions on Plasma Science, 2011, 39 (11), pp.2756. ⟨10.1109/TPS.2011.215906⟩. ⟨hal-00705300⟩