Optical and structural performance of the Al/Zr reflection multilayers in the 17-19nm region

Qi Zhong (1) , Wenbin Li (1) , Zhong Zhang (1) , Jingtao Zhu (1) , Qiushi Huang (1) , Haochuan Li (1) , Zhanshan Wang (1) , Philippe Jonnard (2) , Karine Le Guen (2) , Jean-Michel André (2) , Hongjun Zhou (3) , Tonglin Huo (3)

1 Department Institute of Precision Optical Engineering
2 LCPMR - Laboratoire de Chimie Physique - Matière et Rayonnement
3 National Synchrotron Radiation Laboratory,

Two kinds of Al/Zr (Al(1%wtSi)/Zr and Al(Pure)/Zr) multilayers for extreme ultraviolet (EUV) optics were deposited on fluorine doped tin oxide coated glass by using direct-current magnetron sputtering technology. The comparison of the two systems shows that the Al(1%wtSi)/Zr multilayers have the lowest interfacial roughness and highest reflectivity. Based on the X-ray diffraction, the performance of the two systems is determined by the crystallization of Al layer. To fully understand the Al(1%wtSi)/Zr multilayer, we built up a two-layer model to fit situation of the AFM images, and simulate the grazing incident x-ray reflection measurements of multilayers with various periods (N=10, 40, 60, 80). Below 40 periods, the roughness components are lowered. After 40 periods, both surface and interfacial roughness increase with the period number. According to transmission electron microscope images, the model can represent the variable structure of the system.

Domaines: Optique [physics.optics]

Qi Zhong, Wenbin Li, Zhong Zhang, Jingtao Zhu, Qiushi Huang, et al.. Optical and structural performance of the Al/Zr reflection multilayers in the 17-19nm region. 2012. ⟨hal-00685910⟩