Modeling, Filtering and Optimization for AFM Arrays

H. Hui (1) , Y. Yakoubi (1) , Michel Lenczner (1) , S. Cogan (1) , A. Meister (2) , M. Favre (2) , R. Couturier (1) , S. Domas (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 CSEM - Centre Suisse d'Electronique et de Microtechnique SA [Neuchatel]

In this paper, we present new tools and results developed for Arrays of Microsystems and especially for Atomic Force Microscope (AFM) array design. For modeling, we developed a two-scale model of cantilever arrays in elastodynamics. A robust optimization toolbox is interfaced to aid for design before the microfabrication process. A model based algorithm of static state estimation using measurement of mechanical displacements by interferometry is stated. Quantization of interferometry data processing is analyzed for FPGA implementation. A robust H∞ filtering problem of the coupled cantilevers is solved for time invariant system with random noise effects. Our solution allows semi-decentralized computing based on functional calculus that can be implemented by networks of distributed electronic circuits as shown in a previous paper.

Domaines: Electronique

H. Hui, Y. Yakoubi, Michel Lenczner, S. Cogan, A. Meister, et al.. Modeling, Filtering and Optimization for AFM Arrays. Conference 2011 12th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), Apr 2011, Linz, Austria. pp.1/6-6/6, ⟨10.1109/ESIME.2011.5765783⟩. ⟨hal-00677345⟩