High aspect ratio taper-free micro and nano-channel fabrication in glass with ultrafast nondiffracting Bessel beams

F. Courvoisier (1) , M.K. Bhuyan (1) , M. Jacquot (1) , P.-A. Lacourt (1) , R. Salut (1) , L. Furfaro (1) , J.M. Dudley (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Ultrafast laser pulses are a powerful tool to process dielectrics. Here, we review our recent work concerning high aspect ratio micro and nanochannel processing in glass. We show how femtosecond Bessel beams overcome many of the difficulties associated with Gaussian beams. We report on single shot processing of nanochannels with aspect ratio up to 100. Underlying physical phenomena are discussed.

Mots clés: Femtosecond laser; micromachining; high aspect ratio

Domaines: Optique / photonique

F. Courvoisier, M.K. Bhuyan, M. Jacquot, P.-A. Lacourt, R. Salut, et al.. High aspect ratio taper-free micro and nano-channel fabrication in glass with ultrafast nondiffracting Bessel beams. SPIE-Photonics West 2011, Jan 2011, San Francisco, United States. ⟨10.1117/12.875409⟩. ⟨hal-00661077⟩