AgTi(C, N)-based coatings for biomedical applications: influence of silver content on the structural properties

N K Manninen (1) , R Escobar Galindo (2) , N Benito (3) , N M Figueiredo (4) , A Cavaleiro (4) , C Palacio (3) , S Carvalho (1)

1 Dept. Física
2 ICMM - Instituto de Ciencia de Materiales de Madrid
3 Departamento de Física Aplicada [UAM Madrid]
4 SEG-CEMUC Mechanical Engineering Department

Ag - TiCN coatings were deposited by DC reactive magnetron sputtering and their structural and morphological properties were evaluated. Compositional analysis showed the existence of Ag-TiCN coatings with different Ag/Ti atomic ratios (ranging from 0 to 1.49). The structural and morphological properties are well correlated with the evolution of Ag/Ti atomic ratio. For the samples with low Ag/Ti atomic ratio (below 0.20) the coatings crystallize in a B1-NaCl crystal structure typical of TiC 0.3 N 0.7. The increase of Ag/Ti atomic ratio promoted the formation of Ag crystalline phases as well as amorphous CN x phases detected in both XPS and Raman Spectroscopy analysis. Simultaneously, to the formation of Ag crystalline phases and amorphous carbon based phases, a decrease in TiC 0.3 N 0.7 grain size was observed as well as the coatings densification.

Mots clés: Sputtering; XPS; Raman; TEM

N K Manninen, R Escobar Galindo, N Benito, N M Figueiredo, A Cavaleiro, et al.. AgTi(C, N)-based coatings for biomedical applications: influence of silver content on the structural properties. Journal of Physics D: Applied Physics, 2011, 44 (37), pp.375501. ⟨10.1088/0022-3727/44/37/375501⟩. ⟨hal-00654139⟩