A survey of modeling and control techniques for Micro- and Nano-electromechanical systems

Antoine Ferreira (1) , Sumeet S.Aphale (2)

1 IRAUS - Département Images, Robotique, Automatique et Signal [Orléans]
2 CADR - Centre of Applied Dynamics Research

In the current times, MEMS and NEMS form a major inter-disciplinary area of research involving science, engineering and technology. A lot of work has been reported in the area of modeling and control of these devices, with the aim of better understanding their behavior and improving their performance. This work presents a review of the emerging advances in the modeling and control of these micro- and nanoscale devices and converges on the exciting research in onchip control, with a mechatronics and controls perspective and concludes by projecting future trends.

Mots clés: MEMS; NEMS; lab-on-a-chip; modeling; control

Domaines: Automatique / Robotique

Antoine Ferreira, Sumeet S.Aphale. A survey of modeling and control techniques for Micro- and Nano-electromechanical systems. IEEE Transactions on Systems, Man, and Cybernetics, Part C: Applications and Reviews, 2011, 41 (3), pp 350-364. ⟨10.1109/TSMCC.2010.2072779⟩. ⟨hal-00647907⟩