Electrode oxygen-affinity influence on voltage nonlinearities in high-k metal-insulator-metal capacitors
Résumé
This work highlights the influence of the oxygen affinity of the metal electrodes used in high-k metal-insulator-metal capacitors. Several metallic electrodes are tested in order to investigate the role of the metal work function, and the role of the electrode oxygen-affinity in nonlinear behavior of HfO2 and BaTiO3 capacitors. It is shown that the magnitude of the quadratic coefficient of nonlinearity is better explained by the electrode oxygen-affinity rather than by its work function. It is thought that electrode oxidation increases the number of oxygen vacancies at the electrode/dielectric interface, and so increases the magnitude of nonlinearity. © 2010 American Institute of Physics RELATED DATABASES Scopus View This Record in Scopus Web of Science View this record in Web of Science View Web of Science related articles KEYWORDS and PACS Keywords barium compounds, capacitors, hafnium compounds, MIM devices PACS 85.30.Tv Field effect devices 84.32.Tt Capacitors ARTICLE DATA Permalink http://link.aip.org/link/doi/10.1063/1.3447795 PUBLICATION DATA ISSN: 0003-6951 (print) 1077-3118 (online) Publisher: $abstract.society.value is a Member of CrossRef American Institute of Physics
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