Robust feedforward-feedback control of a nonlinear and oscillating 2-DOF piezocantilever.

Micky Rakotondrabe (1) , Kanty Rabenorosoa (1) , Joël Agnus (1) , Nicolas Chaillet (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Many tasks related to the micro/nano-world require, not only high performances like submicrometric accuracy, but also a high dexterity. Such performances are only obtained using micromanipulators and microrobots with multiple degrees of freedom (DOF). Unfortunately, these multi-DOF systems usually present a strong coupling between the different axis making them very hard to control. The aim of this work is the modeling and control of a 2-DOF piezoelectric cantilever dedicated to microassembly/ micromanipulation tasks. In addition to the coupling between the two axis, the piezocantilever is very oscillating and strongly nonlinear (hysteresis and creep). In the proposed approach, the nonlinearity and vibration are first compensated thanks to the feedforward technique. Afterwards, we derive a decoupled model in order to synthesize a linear robust H1 controller. The experimental results show the efficiency of the proposed approach and their convenience to the micromanipulation/microassembly requirements.

Mots clés: Piezoelectric cantilever; 2 degrees of freedom; coupling; nonlinear; feedforward control; robust control; microassembly/micromanipulation.; microassembly/micromanipulation

Domaines: Micro et nanotechnologies/Microélectronique

Micky Rakotondrabe, Kanty Rabenorosoa, Joël Agnus, Nicolas Chaillet. Robust feedforward-feedback control of a nonlinear and oscillating 2-DOF piezocantilever.. IEEE Transactions on Automation Science and Engineering, 2011, 8 (3), pp.506-519. ⟨10.1109/TASE.2010.2099218⟩. ⟨hal-00635680⟩