Spatially resolved simulation of a radio-frequency driven micro-atmospheric pressure plasma jet and its effluent

Torben Hemke (1) , Alexander Wollny (1) , Markus Gebhardt (1) , Ralf Peter Brinkmann (1) , Thomas Mussenbrock (1)

1 Department of Electrical Engineering and Information Sciences

Radio frequency driven plasma jets are frequently employed as efficient plasma sources for surface modification and other processes at atmospheric pressure. The radio-frequency driven micro atmospheric pressure plasma jet (µAPPJ) is a particular variant of that concept whose geometry allows direct optical access. In this work, the characteristics of the µAPPJ operated with a heliumoxygen mixture and its interaction with a helium environment are studied by numerical simulation. The density and temperature of the electrons, as well as the concentration of all reactive species are studied both in the jet itself and in its effluent. It is found that the effluent is essentially free of charge carriers but contains a substantial amount of activated oxygen (O, O 3 and O 2 (1 ∆)). The simulation results are verified by comparison with experimental data.

Mots clés: Physical Sciences

Torben Hemke, Alexander Wollny, Markus Gebhardt, Ralf Peter Brinkmann, Thomas Mussenbrock. Spatially resolved simulation of a radio-frequency driven micro-atmospheric pressure plasma jet and its effluent. Journal of Physics D: Applied Physics, 2011, 44 (28), pp.285206. ⟨10.1088/0022-3727/44/28/285206⟩. ⟨hal-00633996⟩