Development of a synchrotron biaxial tensile device for in-situ characterization of thin films mechanical response

Guillaume Geandier (1, 2) , Dominique Thiaudière (3) , Rado Nirina Randriamazaoro (4) , R. Chiron (4) , Soundes Djaziri (2) , B Lamongie (2) , Y. Diot (2) , Eric Le Bourhis (2) , Pierre-Olivier Renault (2) , Philippe Goudeau (2) , A. Bouaffad (3) , O. Castelnau (4) , Damien Faurie (5) , François Hild (6)

1 ESRF - European Synchrotron Radiation Facility
2 PPrime [Poitiers] - Institut Pprime [UPR 3346]
3 SSOLEIL - Synchrotron SOLEIL
4 LPMTM - Laboratoire des Propriétés Mécaniques et Thermodynamiques des Matériaux
5 LSPM - Laboratoire des Sciences des Procédés et des Matériaux
6 LMT - Laboratoire de Mécanique et Technologie

We have developed on the DIFFABS-SOLEIL beamline a biaxial tensile machine working in synchrotron environment for in-situ diffraction characterization of thin polycrystalline films mechanical response. The machine has been designed to test compliant substrates coated by the studied films under controlled applied strain field. Technological challenges comprise the sample design including fixation of the substrate ends, the related generation of a uniform strain field in the studied (central) volume, the operations from the beamline pilot. Preliminary tests on 150 nm thick W films deposited onto polyimide cruciform substrates are presented. The obtained results for applied strains using x-ray diffraction and digital image correlation methods clearly show the full potentialities of this new set-up.

Mots clés: Thin films; biaxial tensile setup; in situ; x-ray diffraction; optical measurements

Domaines: Mécanique des matériaux [physics.class-ph]; Mécanique des matériaux [physics.class-ph]

Guillaume Geandier, Dominique Thiaudière, Rado Nirina Randriamazaoro, R. Chiron, Soundes Djaziri, et al.. Development of a synchrotron biaxial tensile device for in-situ characterization of thin films mechanical response. Review of Scientific Instruments, 2010, 81, pp.103903. ⟨10.1063/1.3488628⟩. ⟨hal-00624448⟩