FBAR Filters for Space Application Based on LiNbO3 Membrane

T. Baron (1) , Matthieu Chatras (2) , S. Ballandras (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 MINACOM

Film bulk acoustic resonator (FBAR) usually use for filter application, can be used to address aerospace filter application which need large band. Then, it needs to use piezoelectric material with high electromechanical coupling coefficient. So we use LiNbO3 cut YXl/36 which have coupling coefficient for longitudinal mode of 37.5%.

Domaines: Acoustique [physics.class-ph]; Acoustique [physics.class-ph]

T. Baron, Matthieu Chatras, S. Ballandras. FBAR Filters for Space Application Based on LiNbO3 Membrane. 2nd International Workshop on Piezoelectric MEMS 2011, Sep 2011, Lausanne, Switzerland. ⟨hal-00624320⟩