Modular and Reconfigurable 3D Micro-Optical Benches : Concept, Validation and Characterization.

Kanty Rabenorosoa (1) , Cédric Clévy (1) , Sylwester Bargiel (1) , Jean-Philippe Mascaro (1) , Philippe Lutz (1) , Christophe Gorecki (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

In this paper, we present an approach to design MOEMS based on Reconfigurable Free Space Micro-Optical Benches (RFS-MOB). The proposed concept enables to design modular and reconfigurable MOEMS by using a generic structure of silicon holders and non defined position in the substrate. Various micro-optical elements, e.g. microlenses or micromirrors, can be integrated within holders. Their assembly is achieved with an active microgripper, after high precision alignement within guiding rails of silicon substrate. Flexible parts are used to maintain a final position. The concept is validated by successful assembly of holders. A characterization method of assembled holders is proposed and provides an accuracy better than 0.04 for an angle measurement.

Domaines: Micro et nanotechnologies/Microélectronique

Kanty Rabenorosoa, Cédric Clévy, Sylwester Bargiel, Jean-Philippe Mascaro, Philippe Lutz, et al.. Modular and Reconfigurable 3D Micro-Optical Benches : Concept, Validation and Characterization.. ASME2011 International Manufacturing Science and Engineering Conference (MSEC2011). Collocated with the 4th JSME/ASME 2011 International Conference on Materials and Processings (ICM&P2011)., Jun 2011, Oregon State University Corvallis, United States. pp.1-7. ⟨hal-00612659⟩