A comparison of vibrating beam resonators in Quartz, GaPO(4), LGS and LGT

G. Douchet (1) , F. Sthal (1) , E. Bigler (2) , R. Bourquin (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)
2 Laboratoire de Chronométrie Électronique et Piézoélectricité

The present paper reviews and compares the properties of vibrating beam resonators in length-extensional, flexural and cylindrical-torsional modes; resonators are designed and built with new piezoelectric materials: Gallium orthophosphate (GaPO(4)), Langasite (LGS) and Langatate (LGT). Their characteristics are compared with the results obtained with the same structures built in classical Quartz crystal. For all 3 new crystals, temperature-compensated cuts have been found for length-extensional and flexural modes by a theoretical analysis. Experiments have been made on test beams fabricated by conventional precision lapping/machining and photolithography to deposit electrodes. The existence of temperature-compensated cuts for length-extensional resonators is experimentally confirmed. The possibilities of using temperature-compensated cylindrical resonators in the torsional modes are analysed and their temperature sensitivity is computed.

Domaines: Micro et nanotechnologies/Microélectronique; Acoustique [physics.class-ph]

G. Douchet, F. Sthal, E. Bigler, R. Bourquin. A comparison of vibrating beam resonators in Quartz, GaPO(4), LGS and LGT. Solid State Sciences, 2010, 12 (3), pp.325-332. ⟨10.1016/j.solidstatesciences.2009.08.005⟩. ⟨hal-00609381⟩