Developments in microultrasonic machining (MUSM) at FEMTO-ST
Résumé
The aim of the article is to present new developments in microultrasonic machining concerning design and manufacture of a complete acoustic system optimized for ultraprecise processing on 2-in. wafer and examples of microstructures produced at FEMTO-ST institute, particularly in piezoelectric materials. The potentialities and the limitations of the ultrasonic machining technique are discussed. The choice and the dimensions of the material for the acoustic transducer were defined through finite element modeling. Other parameters affecting the machining process such as static load of the tool, vibration amplitude, grain material and size of the abrasive slurry, and workpiece characteristics were hierarchized experimentally in order to increase machining quality (surface state, precision) and minimize tool wear.
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