The vertical voltage termination technique - characterizations of single die multiple 600V power devices

Kremena Vladimirova (1) , Jean-Christophe Crébier (1) , Christian Schaeffer (1) , Delphine Constantin (2)

1 G2ELab - Laboratoire de Génie Electrique de Grenoble
2 CIME - Centre Interuniversitaire de Micro-Electronique

Deep trench terminations are commonly known as a technique to achieve ideal breakdown voltages for high voltage devices. This paper presents the use of deep trench terminations as an original concept to integrate multiple vertical power devices on a common die. The concept is based on the creation of vertical deep trench terminations on the periphery of the devices, thus allowing to separate the drift regions and to completely insulate the multiple power devices sharing the same backside contact electrode. Power diodes in the range of 600V are fabricated and experimentally tested to validate the concept. The prototypes demonstrated excellent forward and reverse biased static characteristics.

Domaines: Energie électrique

Kremena Vladimirova, Jean-Christophe Crébier, Christian Schaeffer, Delphine Constantin. The vertical voltage termination technique - characterizations of single die multiple 600V power devices. ISPSD 2011 (International Symposium on Power Semiconductor Devices and ICs), May 2011, San Diego, United States. pp.204-207. ⟨hal-00596983⟩