A micromanipulation cell including a microtools changer.

Cédric Clévy (1) , Arnaud Hubert (1) , Joël Agnus (1) , Nicolas Chaillet (1)

1 LAB - Laboratoire d'automatique de Besançon

This paper describes the structure of a flexible micromanipulation cell designed to perform precise pick and place operations of objects with typical sizes from 20 to 500 ¹m. This cell is composed of three linear stages (X-Y-Z), a four degrees of freedom microgripper and a microtools changer.

Domaines: Micro et nanotechnologies/Microélectronique

Cédric Clévy, Arnaud Hubert, Joël Agnus, Nicolas Chaillet. A micromanipulation cell including a microtools changer.. International Workshop on Microfactories (IWMF'04)., Oct 2004, Shangai, China. pp.166-169. ⟨hal-00586203⟩