Analogic fiber optic position sensor with nanometric resolution

Frédéric Lamarque (1) , Christine Prelle (1)

1 Roberval - Roberval

This paper describes a miniature analogic position sensor. This sensor is dedicated to high resolution displacement measurement (10 nm) between two positions on long range (few millimeters). The working principle of the sensor is presented as well as experimentation results.

Mots clés: Fiber optic sensor; nanometric resolution; miniature sensor; displacement sensor

Domaines: Automatique / Robotique; Optique / photonique

Frédéric Lamarque, Christine Prelle. Analogic fiber optic position sensor with nanometric resolution. IEEE sensors, 2002, United States. pp.926 - 930. ⟨hal-00584326⟩