A 2D Transducer Structure for the Excitation of Surface Acoustic Wave

W. Daniau (1) , T. Baron (1) , J. Garcia (1) , Thierry Laroche (1) , S. Ballandras (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

In this work, we propose a new 2D bi-periodic transducer fabricated on single crystal susbtrates allowing for complex wave polarization excitation. The structure has been theoretically analysed using a mixed finite element/boundary element approach, showing numerous acoustic-electric contribution on the harmonic admittance for quartz. An experimental device then has been built on LiNbO3 using SiO2 spacers for 2D interconnection purpose. The device has been tested successfully, allowing for a first demonstration of the transduction principle. More work now will be achieve to better understand the transducer operation and to propose actual application of this 2D transducer.

Mots clés: boundary-elements methods; finite element analysis; quartz; surface acoustic wave transducers

Domaines: Acoustique [physics.class-ph]; Acoustique [physics.class-ph]

W. Daniau, T. Baron, J. Garcia, Thierry Laroche, S. Ballandras. A 2D Transducer Structure for the Excitation of Surface Acoustic Wave. 24th European Frequency and Time Forum (EFTF 2010), Apr 2010, Noordwijk, Netherlands. ⟨10.1109/EFTF.2010.6533656⟩. ⟨hal-00578957⟩