Compositional and physico-optical characterization of 05% Al-doped zinc oxide films prepared by chemical spray pyrolysis

R Romero (1) , R López-Ibáñez (1) , E A Dalchiele (2) , J R Ramos-Barrado (1) , F Martín (1) , D Leinen (1)

1 Dpto. Física Aplicada I & Dpto. Ingeniería Química
2 Facultad de Ingeniería

Highly transparent polycrystalline Al-doped ZnO thin films were deposited in open atmosphere by chemical spray pyrolysis on fused silica and glass substrates at 623 K. The influence of Al doping, 0 to 5 %, was studied. XPS results revealed a linear relationship between Al content in the precursor solutions and Al content in the films. XPS depth profiling showed that any carbon contamination is restricted to the uppermost surface of the films. Optical transmission measurements revealed an increasing amount of dispersion centres as well as a band gap shift to higher values with increasing Al content in the films. At fixed Al concentration, the comparison of the absorption coefficient for increasing film thickness showed that the films are very homogeneous, not changing their materials properties like absorption coefficient and band gap.

Mots clés: optical properties; thin films; chemical synthesis; doping; optical properties.

R Romero, R López-Ibáñez, E A Dalchiele, J R Ramos-Barrado, F Martín, et al.. Compositional and physico-optical characterization of 05% Al-doped zinc oxide films prepared by chemical spray pyrolysis. Journal of Physics D: Applied Physics, 2010, 43 (9), pp.95303. ⟨10.1088/0022-3727/43/9/095303⟩. ⟨hal-00569770⟩